LASER COMPONENTS presents Research Results
Together with partners such as Ruhr-University Bochum, Laserzentrum Hannover and Leibniz Institute for Plasma Research and Technology in Greifswald, the company spent four years investigating new methods for optimizing plasma-based coating processes. A new multipole resonance probe (MRP) was used to prove that drifts and fluctuations in the plasma source can occur even if all other operating parameters are identical. Such fluctuations can be corrected within the framework of an in-situ control, which might have a considerable effect on the laser damage threshold.
"In plasma-assisted coating processes, the mechanical and optical properties of the dielectric layers are highly dependent on the energy input of the plasma," says Dr. Sina Malobabic, who was responsible for coordinating the project at LASER COMPONENTS and carried out all the measurements. "The MRP developed by Ruhr-Uni Bochum monitors the electron density from directly inside the plasma. So for the first time we can monitor and correct irregularities during the coating process. This opens up new possibilities for process optimization."
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